高级检索

窄流道式MOCVD制备YGBCO超导层研究

Synthesis of YGBCO Superconducting Coatings by Metal Organic Chemical Vapor Deposition in Narrow Rectangular-Wedge Reactor

  • 摘要: 金属有机化学气相沉积能连续、快速的沉积高温超导带材YBa2Cu3O7-x (YBCO) 超导层。但金属有机源的利用率与薄膜沉积速率以及沉积一致性难以兼顾, 制备YBCO高温超导带材的成本居高不下。本文提出了一种新的窄流道式反应室以改进薄膜沉积的一致性。在200 mm长度腔体中沉积的280 nm厚的Y0.5Gd0.5Ba2Cu3O7-x薄膜Jc分布在3.2~3.5 MA/cm2 (77 K, 0 T), 面外、面内半高宽值分别在1.39°~1.49°和1.88°~2.13°, 表面平整致密。YBCO薄膜良好的一致性表明该窄流道反应室对制备YBa2Cu3O7-x超导带材有好的实用性。

     

    Abstract: The Y0.5Gd0.5Ba2Cu3O7-x (YGBCO) superconducting coatings were synthesized by metal organic chemical vapor deposition (MOCVD) in a lab-built reactor with a narrow rectangular wedge deposition zone, comprising two tilted Cu-plates (300 mm×11 mm) inside the rectangular vacuum chamber to accelerate the velocity of metal organic vapor.The influence of the rectangular wedge reactor on the properties of the YGBCO coatings was investigated with X-ray diffraction, energy dispersive spectroscopy, scanning electron microscopy and critical current density (Jc) measurement.The results show that the rectangular wedge reactor had a major impact.To be specific, the compact, fairly uniform and single Y123-phased YGBCO coatings, 280 nm in thickness and grown in a 200 mm long reactor, had a Jc up to 3.5 MA/cm2 (measured at 77 K and 0 T).We suggest that the marrow rectangular wedge reactor be capable of rapidly and continuously growing high quality YBCO superconducting tape by MOCVD.

     

/

返回文章
返回