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一种原子气室制备碱金属充制工艺设备的研制

Automatic Control and Precise Filling of Alkali-Metal Gas into Glass Vesicles:A Methodological Study

  • 摘要: 原子气室是新型量子仪表如量子频标和量子传感器等的核心部件,在其制备过程中,碱金属真空充制设备和充制质量控制是工艺和技术难点之一。运用麦克斯韦速率分布规律和Langmuir物质蒸发与凝结理论,研制了一种原子气室制备过程中碱金属充制的自动化控制工艺设备。实现了碱金属充制过程量化控制。经铷泡充制实验验证,充铷量在500±100μg以内的铷泡占已所充铷泡的比率由35%提高至73%;离散度由±550减小至±250μg。该技术和设备可用于原子气室批量制备,具有广泛的应用推广价值。

     

    Abstract: The non-standard equipment,dedicated to the automatically and precisely filling of alkaline metal gas into glass vesicles,was developed.Based on Maxwell distribution law of gas velocity and Langmuir evaporation/condensation theory,the self-developed equipment comprises the vacuum chamber,pumping unit,PLC controller,3 D-workpiece positioner,heater/cooler/thermostat,suppliers of ultrapure gases and etc.The lab-built equipment was tested in fabrication of rubidium vesicles.The results show that the automatic filling significantly outperforms the conventional manual filling.For instance,the proportion of vesicles filled with Rb-content of 500±100 μg increased from 35% to 73%;and the dispersion decreased from ±550 μg to ±150 μg.We suggest that the self-developed equipment be of some technological interest because of batch fabrication,high automation,easy operation and long-term reliability.

     

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