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阴怡媛, 李得天, 张虎忠, 马卓娅, 习振华, 李刚, 张开旭, 宋云见. 基于碳纳米管电子源的高稳定电离真空计的性能研究[J]. 真空科学与技术学报, 2024, 44(4): 312-317. DOI: 10.13922/j.cnki.cjvst.202402009
引用本文: 阴怡媛, 李得天, 张虎忠, 马卓娅, 习振华, 李刚, 张开旭, 宋云见. 基于碳纳米管电子源的高稳定电离真空计的性能研究[J]. 真空科学与技术学报, 2024, 44(4): 312-317. DOI: 10.13922/j.cnki.cjvst.202402009
YIN Yiyuan, LI Detian, ZHANG Huzhong, MA Zhuoya, XI Zhenhua, LI Gang, ZHANG Kaixu, SONG Yunjian. Performance Investigation of a Highly Stable Ionization Gauge Based on Carbon Nanotube Electron Source[J]. CHINESE JOURNAL VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(4): 312-317. DOI: 10.13922/j.cnki.cjvst.202402009
Citation: YIN Yiyuan, LI Detian, ZHANG Huzhong, MA Zhuoya, XI Zhenhua, LI Gang, ZHANG Kaixu, SONG Yunjian. Performance Investigation of a Highly Stable Ionization Gauge Based on Carbon Nanotube Electron Source[J]. CHINESE JOURNAL VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(4): 312-317. DOI: 10.13922/j.cnki.cjvst.202402009

基于碳纳米管电子源的高稳定电离真空计的性能研究

Performance Investigation of a Highly Stable Ionization Gauge Based on Carbon Nanotube Electron Source

  • 摘要: 文章将碳纳米管电子源应用于高稳定电离真空计,通过结构和电参数优化,研制了样机,并开展了样机计量特性的实验研究,研究结果表明,新型电离规在6.87×10−6 Pa ~ 6.45×10−5 Pa的压力范围内,灵敏度在0.200 Pa−1 ~ 0.245 Pa−1的范围内波动,与仿真灵敏度0.250 Pa−1的偏差最大为20%,灵敏度波动小于5.96%,证明该结构设计合理,有望应用于超高真空校准及精确测量领域。

     

    Abstract: In this paper, a carbon nanotube electron source is applied to a highly stable ionization gauge, and a preliminary performance experimental study of the prototype is carried out. The results show that the sensitivity of the novel ionization gauge fluctuates in the range of 0.200 Pa−1 ~ 0.245 Pa−1 from 6.87×10−6 Pa to 6.45×10−5 Pa, with a maximum deviation of 20% from the simulated sensitivity of 0.250 Pa−1, and the sensitivity fluctuation is less than 5.96%, which proves that the structure is well-designed and is expected to be applied to high vacuum calibration and precise measurement.

     

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