Abstract:
In this paper, a carbon nanotube electron source is applied to a highly stable ionization gauge, and a preliminary performance experimental study of the prototype is carried out. The results show that the sensitivity of the novel ionization gauge fluctuates in the range of 0.200 Pa
−1 ~ 0.245 Pa
−1 from 6.87×10
−6 Pa to 6.45×10
−5 Pa, with a maximum deviation of 20% from the simulated sensitivity of 0.250 Pa
−1, and the sensitivity fluctuation is less than 5.96%, which proves that the structure is well-designed and is expected to be applied to high vacuum calibration and precise measurement.