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谢焕钧, 徐长云, 唐令, 韩明月, 罗阳, 李刘合. C2H2气体流量对WC-DLC涂层结构与性能的影响[J]. 真空科学与技术学报, 2024, 44(3): 212-219. DOI: 10.13922/j.cnki.cjvst.202311011
引用本文: 谢焕钧, 徐长云, 唐令, 韩明月, 罗阳, 李刘合. C2H2气体流量对WC-DLC涂层结构与性能的影响[J]. 真空科学与技术学报, 2024, 44(3): 212-219. DOI: 10.13922/j.cnki.cjvst.202311011
XIE Huanjun, XU Changyun, TANG Ling, HAN Mingyue, LUO Yang, LI Liuhe. Effect of C2H2 Flow Rate on the Structure and Properties of WC-DLC Coatings[J]. CHINESE JOURNAL VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(3): 212-219. DOI: 10.13922/j.cnki.cjvst.202311011
Citation: XIE Huanjun, XU Changyun, TANG Ling, HAN Mingyue, LUO Yang, LI Liuhe. Effect of C2H2 Flow Rate on the Structure and Properties of WC-DLC Coatings[J]. CHINESE JOURNAL VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(3): 212-219. DOI: 10.13922/j.cnki.cjvst.202311011

C2H2气体流量对WC-DLC涂层结构与性能的影响

Effect of C2H2 Flow Rate on the Structure and Properties of WC-DLC Coatings

  • 摘要: 文章采用直流磁控溅射技术制备WC-DLC耐磨涂层,为了探究C2H2流量对WC-DLC涂层表截面形貌、微观结构、力学和摩擦学性能的影响,在10−50 mL/min C2H2流量下制备了WC-DLC涂层并进行表征分析。结果表明,随着C2H2流量的增加,涂层中碳含量增加,晶粒逐渐细化,由柱状晶逐渐转变为细晶粒,涂层变得更加致密;涂层纳米硬度与sp3杂化的C原子含量密切相关,随着涂层中sp3-C含量的增加,硬度先升高然后降低,磨损率也先升高降低;随着碳原子含量升高,涂层中出现大量的非晶碳,表面晶粒非晶化,涂层的摩擦系数逐渐减小且更加稳定。

     

    Abstract: WC-DLC wear-resistant coatings were prepared by DC magnetron sputtering, and the influence of C2H2 gas flow rate on surface morphology, microstructure, mechanical and tribological properties of WC-DLC coatings prepared with a flow rate of C2H2 at 10−50 mL/min was investigated. Results show that, with the increasing flow rate of C2H2, the content of carbon in the coatings increases, the constituent of the coating gradually changes from columnar grain to fine grain, and the coating becomes denser. The nano-hardness of the coating is closely related to the content of hybridized sp3 carbon atoms. As the content of sp3-C in the coating increases, the hardness and wear rate of the coatings increase first and then decrease. When the carbon atom exceeds a certain content, a large amount of amorphous carbon will appear, the surface of the coating will become amorphous, and the friction coefficient gradually decreases and becomes more stable.

     

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