一种双工位NEG吸气性能测试装置设计

A Design of Sorption Characteristics Test Device with Two Test Stations

摘要: 文章设计了可选择定压法或定容法测量非蒸散型吸气剂（NEG）吸气性能的测试装置，装置设计有两个结构对称的测试工位，可同时对两个测试样品进行预处理和性能测试，装置结构设计合理紧凑，测试效率高。测试装置可直接通过软件输出吸气速率和吸气量等性能参数。测试结果表明该装置本底真空度高，其中样品室真空度优于1×10⁻⁷ Pa，漏放气速率小于3×10⁻⁷ Pa·L/s；测试数据精度高且可靠，其中吸气速率测量精度达1 mL/s，吸气量测量精度达1 Pa·mL。

Abstract: A test device is designed to measure the NEG properties by either the constant pressure or the constant volume method. The device has two test stations with symmetrical structures, which can pretest and test two samples at the same time. The device has a reasonable structure and high test efficiency. The test device can directly output performance parameters by software, such as sorption rate and sorption quantity. The test results show that the vacuum of the device is high, such as the vacuum of the sample chamber is better than 1×10⁻⁷ Pa, the leakage rate is less than 3×10⁻⁷ Pa·L/s, the test data of the device is high precision and reliable, such as the sorption rate measurement accuracy is 1 mL/s, the sorption quantity measurement accuracy is 1 Pa·mL.