Abstract:
Controllability of uniformity or homogeneity of process gas introduction is one of the important research topics in the display panel industry, affecting the quality of substrate coating directly. Based on the kinematic laws of fluid flow in a circular tube, the influencing factors of flow non-uniformity caused by dichotomy at multiple outlets are analyzed, and a structural design method is proposed for rod-shaped and ring-shaped conduits based on the inverse rotation dichotomy. The rod-shaped and ring-shaped conduits are fabricated using additive manufacturing technology and subjected to uniformity experiments, and the flow uniformity of experimental data is analyzed using the dimensionless analysis method. The research results indicate that turning channels are the main reason affecting the uniformity of dichotomy; after n-stage dichotomy, the single flow channel is divided into 2
n, and the installation of an accumulation chamber before the outlets can significantly improve the flow uniformity. Through comparative studies of fluid kinematic simulations and experimental data, the effectiveness and superiority of the structural design method were verified, providing a reference for the uniformity shunt design of gas uniform supply devices.