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干式多级罗茨真空泵变转速运行特性实验研究

Experimental Research on the Variable-speed Operating Characteristics of a Dry Multistage Roots Vacuum Pump

  • 摘要: 为研究转速对干式多级罗茨真空泵运行特性的影响,搭建了六级罗茨真空泵实验测试平台,对不同转速下的温度、压力、流量和电功率进行测试,并基于气体阻力矩模型计算各级气体压缩功率,分析零流量启动过程、零流量极限工况和变流量稳态工况下的热力、抽气与功率特性。结果表明,各级进气压力呈梯级分布,机壳外壁面温度呈非均匀分布,最高温度始终位于高压侧第六级。转速由2700 r·min−1升高至5100 r·min−1时,热态稳定后的极限进气压力由10.36 Pa降低至0.04 Pa。5100 r·min−1时,机壳外壁面最高温度为66.2℃,第五级和第六级气体压缩功率合计占整机气体压缩总功率的94.33%,整机气体压缩功率占电机输入功率的35.6%。不同转速下的容积流量和容积效率均随进气压力升高呈先增大后减小的趋势,峰值对应的进气压力集中在200 Pa附近。5100 r·min−1时,在5100 r·min−1下,容积流量和容积效率的峰值分别为483.93 L·min−1和79.97%,且容积流量在100~1000 Pa进气压力范围内保持较高水平。研究结果明确了转速对多级罗茨真空泵级间压力、温度分布、功率分配及抽气性能的影响,可为其变频设计与性能优化提供实验依据。

     

    Abstract: To investigate the effects of rotational speed on the operating characteristics of a dry multistage Roots vacuum pump, an experimental test rig for a six-stage Roots vacuum pump was established. Temperature, pressure, volumetric flow rate, and electrical power were measured at different rotational speeds. A gas resistance torque model was employed to calculate the gas compression power of each stage. The thermal, pumping, and power characteristics were analyzed under zero-flow startup, zero-flow ultimate-pressure, and variable-flow steady-state conditions. The results show that the interstage pressures exhibit a stepwise distribution, while the casing outer-wall temperature is distributed nonuniformly. The maximum temperature is consistently located on the outer wall of the high-pressure sixth stage. As the rotational speed increased from 2700 to 5100 r·min−1, the ultimate inlet pressure after thermal stabilization decreased from 10.36 to 0.04 Pa. At 5100 r·min−1, the maximum casing outer-wall temperature was 66.2℃. The fifth and sixth stages together accounted for 94.33% of the total gas compression power, while the total gas compression power accounted for 35.6% of the motor input power. At all tested rotational speeds, the volumetric flow rate and volumetric efficiency first increased and then decreased with increasing inlet pressure, with their peaks occurring at approximately 200 Pa. At 5100 r·min−1, the maximum volumetric flow rate and volumetric efficiency reached 483.93 L·min−1 and 79.97%, respectively. The volumetric flow rate remained relatively high over the inlet pressure range of 100–1000 Pa. These results clarify the effects of rotational speed on the interstage pressure distribution, temperature distribution, power distribution, and pumping performance of a dry multistage Roots vacuum pump, and provide an experimental basis for variable-speed design and performance optimization.

     

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