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一种基于对称结构测试罩耦合标准流导的抽速测量装置设计

Design of a Pumping Speed Measurement Apparatus Based on a Symmetric Structure Test Dome Coupled with a Standard Conductance

  • 摘要: 传统高/超高真空泵采用流量法结合流导法,实现测试罩内处于(10−1 ~10−6)Pa压力下的抽速测试,存在测试罩入口压力范围窄、测试结果不确定度大等局限。本文提出了一种基于对称结构测试罩耦合标准流导的高/超高真空泵抽速测试新方法,采用对称结构设计,用两组相同测试罩分别安装被测真空泵和标准流导,以真空计作为比较器分别测量同一气体流量在两个测试罩内形成的气体压力,将标准流导元件对某种气体的分子流导值作为参考标准计算得到被测泵对该气体的抽速。该方法避免了传统方法使用真空计测量绝对压力偏差较大、仅能测量等效气体抽速等问题,也无需提供已知的标准气体流量,可实现测试罩内气体压力在(10−1 ~10−7)Pa范围内的抽速测试,测量结果的合成标准不确定度减小到2.5%。

     

    Abstract: The pumping speed of high vacuum/ultra-high vacuum (HV/UHV) pumps is commonly tested by combining the flow-rate method with the conductance method under the pressure range of 10−1 to 10−6 Pa. Nevertheless, this technique is constrained by drawbacks including the narrow inlet-pressure range of the test dome and large measurement uncertainty of test results. This paper proposes a novel pumping-speed measurement approach for HV/UHV pumps, which employs a symmetrically structured test dome coupled with a standard conductance element. In this symmetric configuration, two identical test domes are fitted, respectively, with the pump-under-test and the standard conductance element. Vacuum gauges are utilized as comparators to measure gas pressures induced by the identical gas flow rate in the two test domes. The pumping speed of the pump under test for a given gas is calculated by taking the molecular conductance of the standard conductance element for that specific gas as the reference standard. The proposed method overcomes the limitations of conventional techniques, such as the considerable deviations in the absolute-pressure readings of vacuum gauges and the restriction to equivalent-gas pumping-speed measurement. Furthermore, it eliminates the requirement for a known standard gas flow rate and enables pumping-speed measurement over the pressure interval of 10−1 to 10−7 Pa in the test dome. The combined standard uncertainty of the measured results is reduced to 2.5%.

     

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