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304不锈钢在变温真空环境下的放气特性及双机制动力学模型研究

The Outgassing Characteristics and Dual-mechanism Kinetic Model of 304 Stainless Steel in a Variable-temperature Vacuum Environment

  • 摘要: 不锈钢材料的放气速率是高真空系统设计的关键参数,直接影响系统的极限真空度和预抽真空时间。为了获得不同烘烤温度下材料的动态放气规律,本文基于动态流量法高真空放气速率测试平台,系统研究了304不锈钢在27~250℃范围内的变温放气特性。实验通过固定流导小孔实时监测样品室与泵室之间的压力差,并扣除相同温度和相同预抽真空时间下的装置本底放气速率,计算得到304不锈钢样品的单位面积放气速率。结果表明,在常温及高温区(≥200℃),单一Fick扩散模型能够较好描述放气速率衰减规律,拟合相关系数R2≥0.87;而在150℃过渡温区,单一模型拟合精度明显下降,提示该温区放气过程可能呈现表面解吸与体相扩散共同作用的混合机制特征。为进一步描述该温区的放气行为,本文引入包含表面解吸指数衰减项与体相扩散幂律项的双机制叠加模型,并对不同温度下的放气曲线进行了拟合验证。结果显示,该模型在各温度下均具有较高拟合相关系数,其中150℃条件下拟合改善最为显著,R2由0.78提高至0.98。本文结果可为304不锈钢真空容器在不同温度条件下的放气速率评估和高真空系统设计提供实验依据和模型参考。

     

    Abstract: The outgassing rate of stainless steel is a critical parameter in the design of high vacuum systems, as it directly affects the ultimate pressure and pump-down time of the system. To characterize the dynamic outgassing behavior of materials at different baking temperatures, this study investigated the variable-temperature outgassing characteristics of 304 stainless steel within the range of 27℃ to 250℃ using a high-vacuum outgassing rate testing platform based on the dynamic flow method. The area-specific outgassing rate of the 304 stainless steel samples was calculated by real-time monitoring of the pressure difference between the sample chamber and the pump chamber through an orifice with fixed conductance, followed by subtraction of the background outgassing rate measured under the same temperature and pump-down time conditions. The results show that, at room temperature and in the high-temperature region (≥200℃), the single Fick diffusion model can reasonably describe the decay behavior of the outgassing rate, with fitting correlation coefficients R2≥0.87. However, in the transition temperature region of 150℃, the fitting accuracy of the single model decreases significantly, suggesting that the outgassing process in this region may involve a mixed mechanism associated with surface desorption and bulk diffusion. To further describe the outgassing behavior in this temperature region, a dual-mechanism superposition model incorporating a surface desorption exponential decay term and a bulk diffusion power-law term was introduced and verified by fitting the outgassing curves at different temperatures. The results show that this model achieves high fitting correlation coefficients at all tested temperatures, with the most significant improvement observed at 150℃, where R2 increases from 0.78 to 0.98. The results provide experimental data and model references for evaluating the outgassing rate of 304 stainless steel vacuum vessels under different temperature conditions and for designing high vacuum systems.

     

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