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脉冲电压大小对2024铝合金表面沉积DLC薄膜性能调控机制研究

The Regulation Mechanism of Pulse Voltage on the Properties of DLC Films Deposited on 2024 Aluminum Alloy Surfaces

  • 摘要: 采用等离子体增强化学气相沉积技术,在2024铝合金表面沉积类金刚石(DLC)薄膜,研究了脉冲电压对薄膜微观键合结构、表面形貌以及整体服役性能的影响。结果表明,随脉冲电压升高,薄膜厚度不断增大,氢含量及C–H键逐渐减少,sp2杂化键含量升高,表面粗糙度呈先降低后升高的趋势,在1800 V时薄膜最为平整且致密。薄膜与基体的结合强度随电压增加而降低,高电压下内应力显著增大。薄膜硬度和弹性模量随电压先升高后降低,在1800 V时分别达到16.75GPa和139.4GPa,同时摩擦系数最低、H/(Ef)值最高,表现出优异的耐磨性能。在3.5 wt%的NaCl介质中,DLC 薄膜作为有效的物理屏障,显著抑制了基体的电化学腐蚀过程。其中1800 V 电压下制备的薄膜展现出最大的阻抗与极低的孔隙率,具备最优异的综合耐蚀性能。脉冲电压作为关键工艺参数,调节了等离子体密度与轰击能量,从而主导了薄膜力学特性与化学稳定性的演化规律,进而影响DLC薄膜的力学性能及腐蚀行为。相应机理为铝合金表面高性能DLC防护涂层制备奠定了坚实的理论基础。

     

    Abstract: Using plasma-enhanced chemical vapor deposition, diamond-like carbon (DLC) films were deposited on 2024 aluminum alloy substrates. The effects of pulse voltage on the film microstructure, surface morphology evolution, and overall service performance were systematically investigated. The results show that as the pulse voltage increased, the film thickness gradually increased, while the hydrogen content and C–H bond concentration decreased. Meanwhile, the fraction of sp2-hybridized carbon increased, and the surface roughness initially decreased and then increased. At 1800 V, the film exhibited the highest surface flatness and density. As the pulse voltage increased, the film–substrate adhesion decreased, whereas the internal (residual) stress rose markedly at higher voltages. The film hardness and elastic modulus exhibited a non-monotonic dependence on pulse voltage, increasing initially and then declining; both peaked at 1800 V, reaching 16.75 GPa and 139.4 GPa, respectively. At this voltage, the friction coefficient was minimized and the H/Ef ratio was maximized, indicating superior wear resistance. In a 3.5 wt% NaCl solution, the DLC films acted as effective physical barriers, significantly suppressing the electrochemical corrosion of the substrate. The film prepared at 1800 V exhibited the highest charge transfer resistance and extremely low porosity, demonstrating the best overall corrosion resistance. As a critical process parameter, pulse voltage regulates plasma density and ion bombardment energy, thereby controlling the evolution of mechanical properties and chemical stability. This, in turn, determines the mechanical performance and corrosion resistance of the DLC films. These findings provide a solid theoretical basis for the fabrication of high-performance DLC protective coatings on aluminum alloy substrates.

     

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