高级检索

锆掺杂氧化镁-金薄膜二次电子发射性能研究

Secondary Electron Emission Performance of Zr-Doped MgO-Au Thin Films

  • 摘要: 随着真空电子技术的发展,一系列仪器设备需利用高增益、快响应、长寿命的电子倍增器来提升综合性能。为满足真空电子领域对高性能电子倍增器的需求,本文研究了一种基于锆掺杂的氧化镁-金薄膜。利用Materials Studio软件的CASTEP模块对MgO掺杂Zr的情况进行第一性原理计算,分析几何优化后超晶胞的电子结构得出,进行Zr掺杂后晶体禁带宽度变窄、特定晶面的功函数降低,为后续实验提供支撑。利用磁控溅射法进行薄膜制备,测定其二次电子发射性能并与MgO-Au薄膜进行对比,通过多种表征手段深入分析薄膜性状,结果显示,与MgO-Au薄膜相比,0.06 %~0.18 %的Zr掺杂含量能够有效改善薄膜二次电子发射性能,逐步提升Zr掺杂含量会使薄膜二次电子发射性能优化程度先升高后降低,Zr掺杂含量为0.12 %时效果最优,为该薄膜的工程应用提供了重要的工艺窗口参考。

     

    Abstract: With the development of vacuum electronics technology, electron multipliers with high gain, fast response and long service life are required by a variety of instruments and devices to improve their overall performance. To meet the demand for high-performance electron multipliers in the field of vacuum electronics, this paper investigates a Zr-doped MgO-Au thin film. First-principles calculations for Zr-doped MgO were performed using the CASTEP module embedded in Materials Studio. Analysis of the electronic structures of geometrically optimized supercells reveals that Zr doping reduces the band gap of MgO crystals and lowers the work function of specific crystal facets. This provides theoretical guidance for subsequent experimental investigations. The films were prepared by magnetron sputtering, and their secondary electron emission performances were measured and compared with those of the MgO-Au thin film. Through various characterization techniques, in-depth analyses of film performance were carried out. The results show that, compared with MgO-Au thin films, Zr doping concentrations in the range of 0.06 % to 0.18 % can effectively improve the secondary electron emission performance of the film. Gradually increasing Zr doping concentrations causes such performance improvement to first increase and then decrease, with the optimal effect achieved at a Zr doping concentration of 0.12 %. This provides an important process window reference for the engineering application of this film.

     

/

返回文章
返回