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Ti/Al摩尔比对CrTiAlN硬质膜硬度及耐磨性的影响研究

The Influence of Ti/Al Molar Ratio on the Hardness and Wear Resistance of CrTiAlN Hard Films

  • 摘要: 本研究在固定Cr含量约63 at%、N含量44–46 at%及沉积工艺一致的条件下,通过系统调控Ti/Al摩尔比,采用磁控溅射制备了一系列CrTiAlN硬质膜,探究了Ti/Al摩尔比对膜层相结构、力学性能及摩擦学行为的影响。结果表明,随Ti/Al摩尔比降低,膜层相结构经历“Fcc-(Cr,Ti,Al)N单相固溶体、Fcc-(Cr,Ti,Al)N饱和固溶体到Fcc与w-AlN两相共存”的演变,微观形貌相应由致密柱状晶转变为球状团簇。硬度、结合力与摩擦系数均呈非单调变化。当Ti/Al摩尔比约1.12时,膜层性能达到优化,硬度~2100 HV,结合力>33 N,稳态摩擦系数~0.15且曲线平滑。该性能源于Fcc过饱和固溶强化与致密膜层组织的协同效应。Ti/Al比过高(>2.08)则固溶强化不足;Ti/Al比过低(<0.64)则w-AlN析出致Fcc结构受损,结晶度下降,同时引起硬度下降、摩擦系数上升至0.45。对力学性能的综合分析,确定了优化Ti/Al摩尔比区间为0.6−1.2,此区间内膜层硬度≥1800 HV、结合力≥30 N,保持稳定耐磨性能。

     

    Abstract: In this study, with the Cr content fixed at approximately 63 at.%, the N content in the range of 44–46 at.%, and the deposition parameters held constant, a series of CrTiAlN hard coatings were deposited by magnetron sputtering via systematically varying the Ti/Al molar ratio, while the Ti/Al molar ratio was systematically varied, the influence of the Ti/Al ratio on phase structure, mechanical properties, and tribological behavior was investigated. With decreasing Ti/Al ratio, the phase structure evolved from a single Fcc-(Cr,Ti,Al)N solid solution to Fcc-(Cr,Ti,Al)N saturated solid solution and finally to a dual-phase structure of Fcc and w-AlN, while the microstructure transformed from dense columnar grains to globular clusters. Hardness, adhesion, and friction coefficient all exhibited a non-monotonic variation feature. When the Ti/Al molar ratio was approximately 1.12, the coating achieved optimized performance, exhibiting a hardness of ~2100 HV, an adhesion strength exceeding 33 N, and a steady-state friction coefficient of ~0.15 with a smooth friction curve. This performance originates from the synergy of saturated solid solution strengthening and dense film structure. Excessively high Ti/Al ratios (>2.08) led to insufficient strengthening, whereas excessively low Ti/Al ratios (<0.64) caused w-AlN precipitation and collapse of the Fcc crystal structure, resulting in a sharp hardness drop and a surge in friction coefficient to 0.45. A comprehensive analysis of the mechanical properties identified the optimal Ti/Al molar ratio range to be 0.6−1.2, within which the films exhibit hardness ≥1800 HV, adhesion ≥30 N, and stable wear resistance.

     

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