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基于双矩形密封圈超高真空差分旋转机构设计与实验

Experimental Study on the Design of an Ultra-High Vacuum Differential Rotational Mechanism Based on Dual Rectangular Sealing Rings

  • 摘要: 本文针对超高真空(UHV)设备实现从大气环境到超高真空环境可靠过渡,同时提供360°连续、精密旋转运动的使用需求,采用带尖角的矩形密封圈并设计了相应的旋转差分密封机构。利用有限元分析软件,对常用的O形密封圈与带尖角矩形密封圈表面接触应力进行了分析,对比相似最大表面接触应力下阻力的关系,并搭建实验系统研究单胶圈密封和差分密封在静态和旋转运动情况下的真空密封性能。结果表明带尖角的矩形密封圈在动密封方面更有优势。相同最大接触应力条件下O形密封圈的转动阻力是矩形密封圈的2.5倍。单胶圈漏率约107 Pa·m3/s,差分密封比单层胶圈漏率小3个数量级约10−10 Pa·m3/s。具有更优异的密封效果与更高的稳定性。

     

    Abstract: To address the operational requirements for ultra-high vacuum (UHV) equipment to achieve a reliable atmospheric-to-UHV transition while enabling 360° continuous and precise rotational motion, a rectangular sealing ring with sharp edges was adopted, and a corresponding rotational differential sealing mechanism was designed herein. Finite element analysis (FEA) software was employed to analyze the surface contact stress of conventional O-rings and the sharp-edged rectangular sealing rings, with a comparison of their rotational resistance under the condition of an equivalent maximum surface contact stress. Furthermore, an experimental system was established to investigate the vacuum sealing performance of single-ring sealing and differential sealing configurations under both static and rotational operating conditions. The results demonstrate that the sharp-edged rectangular sealing ring exhibits superior performance in dynamic sealing applications. Specifically, the rotational resistance of the O-ring is 2.5 times that of the rectangular sealing ring under identical sealing conditions. The leak rate of the single-layer sealing ring is approximately 107 Pa·m3/s, while the double-layer rectangular ring-based differential sealing achieves a leak rate of around 1010 Pa·m3/s, representing a three-order-of-magnitude reduction compared with the single-layer structure, thus delivering an enhanced sealing effect and improved operational stability.

     

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