Abstract: In order to investigate the effect of Mo doping on the microstructure, mechanical properties and tribological properties of TiAlN coatings, the TiAl(Mo)N coatings were co-deposited in this paper by using DCMS + HiPIMS, and the Mo content in the coatings was modulated by varying the power of the Mo target. The influence of Mo on the cross-section morphology, elemental content and phase structure of TiAl(Mo)N coatings was investigated using SEM, EDS and XRD. The hardness, elastic modulus, friction factor and wear rate of the coatings were characterized by using nanoindentation, tribotester, and three-dimensional profilometer, respectively. The results reveal that the TiAl(Mo)N coatings have a face-centered cubic structure and grow along the (111) and (200) crystal planes. The hardness and elastic modulus increase with the increase of the Mo content in the coatings, and the maximum hardness and elastic modulus are obtained when the Mo content is 6.1 at.%, which are 40.8 ± 1.84 GPa and 577.7 ± 32.70 GPa, respectively. The smallest average friction factor of TiAl(Mo)N coating is 0.29, and the lowest wear rate is 1.62 × 10⁻¹⁴ m³/(Nm), compared with TiAlN coating, the anti-wear degree is increased by 30.8%. The abrasive wear and oxidation wear are the main wear mechanisms of TiAl(Mo)N coating, and the improvement of the anti-wear ability of the coating originates from the excellent mechanical properties and the generation of the MoO₃ lubrication phase.