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基于光腔衰荡吸收光谱技术的极小真空分压力校准设备研究进展

Research Progress on the Application of Ultra-Low Partial Pressure Calibration Devices Based on Cavity Ring-Down Absorption Spectroscopy

  • 摘要: 为进一步降低真空分压力的测量下限并解决传统真空计量仪器周期性校准等问题,开始采用光量子技术进行真空分压力的测量与校准。该方法基于光腔衰荡吸收光谱(CRDS)技术实现气体吸收系数的高精度测量,并依据相关公式反演气体分子数密度,进而获得对应气体的真空分压力量值。文章基于CRDS技术发展,系统梳理了光腔衰荡吸收光谱技术的出现与发展过程,展示了其在真空分压力领域的非侵入、高灵敏度、免校准等独特优势,并通过兰州空间技术物理研究所典型极小真空分压力校准装置的研制过程结合相关仿真结果从理论层面验证了CRDS技术在极小真空分压力测量领域的可行性。最终分析表明,CRDS技术在未来有望实现更低压力量值测量,推动真空计量向便携化与绝对标准化方向发展。

     

    Abstract: In order to further lower the measurement limit of vacuum partial pressure and address issues such as the periodic calibration of traditional vacuum measurement instruments, photonic quantum technology has been adopted for the measurement and calibration of vacuum partial pressure. This method, based on cavity ring-down spectroscopy (CRDS), enables high-precision measurement of gas absorption coefficients. By applying relevant formulas, the molecular number density of the gas is retrieved, thereby obtaining the corresponding vacuum partial pressure value. This paper systematically reviews the emergence and development of CRDS technology, highlighting its unique advantages in the field of vacuum partial pressure, including non-invasiveness, high sensitivity, and calibration-free operation. Through the development of a typical ultra-low vacuum partial pressure calibration device at the Lanzhou Institute of Physics, combined with relevant simulation results, the feasibility of CRDS technology for ultra-low vacuum partial pressure measurement is theoretically validated. The final analysis indicates that CRDS technology holds promise for achieving even lower pressure measurements in the future, advancing vacuum metrology toward portability and absolute standardization.

     

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