Abstract: Bombardment target sophistication is a key link in ensuring vacuum and stability in the X-ray control process, but there are common problems in the traditional process, such as low efficiency of bombardment target sophistication and excessive parameters leading to anode target damage. Based on this, a multiphysics computation model of heat transfer and electromagnetic coupling during the sophistication of X-ray tube bombardment targets is constructed, and the whole process of electron beam emission, focusing, heat conduction and radiation heat transfer is simulated, and finally the coupling influence mechanism of “electrode parameter-electron beam-heat source-temperature field” of the transient heat source anode is obtained. When the focus form of the electron beam is “large focus, high power”, the anode can quickly heat up to 750℃ in 20 minutes, and the maximum temperature of the bullseye has been lower than the melting point of the material, which is the best focus form of the bombardment target, which not only improves the efficiency of the bombardment target sophistication process but also ensures the safety of the product.