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气体分析仪可靠性提升的关键技术和设计研究

Key Technologies and Design for Improving the Reliability of Gas Analyzer

  • 摘要: 针对气体分析仪在复杂应用场景下对可靠性、稳定性及检测性能的高要求,本文以全国产化设计的大质量数(1~1000 amu)四极质谱计为核心,研制了用于气体成分分析的气体分析仪。为提升仪器综合性能,从宽变压精准进样方法、射频电源优化、质谱扫描模式改进等关键环节开展设计。实现常压的气体样品精确进样,解决测试质量歧视问题,提高了混合气体分辨能力。性能测试结果表明,仪器稳定性测试结果为 2.98%,重复性测试结果为 2.15%,均优于 5%。对惰性气体的检测极限优于 2 ppm,对多组分混合气体(含 ppm 级与百分比级组分)具有良好的分辨能力与重复性能。该设计有效提升了气体分析仪的可靠性、稳定性与检测准确性,可为环境监测、工业控制、科学研究等领域的复杂气体分析提供技术支撑。

     

    Abstract: To meet the high requirements for reliability, stability and detection performance of gas analyzers in complex application scenarios, this paper develops a gas analyzer for gas composition analysis with a fully domestic-designed quadrupole mass spectrometer with a large mass range (1~1000 amu) as the core. To improve the performance of the instrument, design work is carried out on key links such as the precise sampling method for wide pressure variation, radio frequency power supply optimization and mass spectrum scanning mode improvement. The accurate sampling of gas samples at atmospheric pressure is realized, the problem of test mass discrimination is solved, and the resolution capability of mixed gases is improved. The performance test results show that the instrument has a stability test result of 2.98% and a repeatability test result of 2.15%, both superior to 5%. Its detection limit for inert gases is better than 2 ppm, and it has good resolution and repeatability for multi-component mixed gases (including ppm-level and percentage-level components). This design effectively improves the reliability, stability and detection accuracy of the gas analyzer, and can provide technical support for complex gas analysis in fields such as environmental monitoring, industrial control and scientific research.

     

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