Abstract: With the advent of the Internet of Things (IoT) era, an increasing number of smart micro/nano-electronic devices require an autonomous power supply to connect to the internet, thereby generating an urgent demand for miniaturized power sources compatible with integrated circuit manufacturing. All-solid-state thin-film microbatteries (ASSTFBs), fabricated using various thin-film deposition techniques, can be integrated on-chip in arbitrary shapes and effectively utilize the residual space within devices. Consequently, these miniaturized power sources are considered ideal for powering IoT microelectronic devices. However, compared to commercially available traditional lithium/lithium-ion batteries, the development of ASSTFBs remains immature, necessitating significant modifications in structural construction, selection of high-performance electrode materials, and battery fabrication processes to achieve new advancements. Consequently, this article provides a comprehensive review of the latest research advancements in ASSTFBs, with particular emphasis on the characteristics and recent modification strategies of lithium phosphorus oxynitride thin-film solid-state electrolytes, as well as common cathode and anode materials. Finally, the article discusses and prospects the future development trends for constructing higher-performance ASSTFBs.