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便携式真空计现场校准装置及不确定度评定

Portable On-site Vacuum Gauge Calibration Apparatus and Uncertainty Evaluation

  • 摘要: 本文介绍了新研制的便携式真空计现场校准装置并对其测量不确定度进行了分析评定。文中研制出一台便携式真空计现场校准装置,将动态比较法和动态流量法两种方法耦合以实现(10−2~10−5)Pa的校准范围,满足了科研生产中对现场真空计校准的迫切需求。该装置的校准结果涉及校准室压力、进气压力、进气流导元件的分子流导值、抽气流导元件的分子流导值以及返流比等多项参数,现场校准时环境温度的变化将对各参数取值及其对应的不确定度分量产生影响,因此对装置校准结果的测量不确定度进行正确分析和评定对保证真空计现场测试量值准确具有重要意义。本文根据装置测量原理及不确定度评定理论建立了装置的测量模型,结合实际实验数据进行了各不确定度分量分析评定及其受温度变化影响情况分析。评定结果表明:装置在温度为(25±15)℃且最大波动5℃(±2.5℃)的现场环境下校准时,采用动态比较法的测量不确定度为2.4%~3.2%(k=2),采用动态流量法的测量不确定度为6%~7%(k=2)。

     

    Abstract: This paper introduces a newly developed portable on-site vacuum gauge calibration apparatus and analyzes its measurement uncertainty. A portable on-site calibration apparatus was developed, in which the dynamic comparison method and the dynamic flow method are coupled to achieve a calibration range of (10−2 to 10−5) Pa, meeting the urgent need for field calibration of vacuum gauges in scientific research and industrial production. The calibration results involve multiple parameters, including chamber pressure, inlet pressure, molecular conductance values of both inlet and pumping flow elements, and backstreaming ratio, and since ambient temperature variations during field calibration will affect these parameter values and their corresponding uncertainty components, proper analysis and evaluation of measurement uncertainty are crucial for ensuring the accuracy of field vacuum gauge measurements. Based on the device's measurement principles and uncertainty evaluation theory, this study establishes the corresponding measurement model and analyzes each uncertainty component and its temperature dependence using actual experimental data. The evaluation results show that when calibrating in field environments with temperatures of (25±15)℃ and maximum fluctuations of 5℃ (±2.5℃), the device achieves measurement uncertainties of 2.4%~3.2% (k=2) using the dynamic comparison method and 6%~7% (k=2) using the dynamic flow method.

     

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