Abstract: Piezoelectric ceramic motors, valued for their high-precision control and lubrication-free operation, are finding increasingly widespread application in high-vacuum and even ultra-high-vacuum systems. However, the friction-driven nature of these motors inevitably leads to friction-induced outgassing during operation. The released gases contaminate the pristine vacuum environment. Therefore, conducting friction outgassing experiments on ceramics under vacuum conditions and investigating the outgassing phenomena and mechanisms are critical for effectively mitigating the impact of friction outgassing. This study employed commonly used 96% alumina ceramic plates as the research subject. The friction-induced outgassing volume was measured under varying loads, sliding speeds, and sliding distances. The composition of the released gases during friction was analyzed using an RGA (Residual Gas Analyzer) mass spectrometer. Scanning electron microscopy (SEM) was used to observe the microstructural surface changes of ceramics induced by friction. By analyzing the outgassing volume curves under different conditions, the influencing factors inducing ceramic friction outgassing were investigated. The results indicate a linear positive correlation between outgassing volume and load, speed, and distance, confirming its synergistic dependence on multiple factors, including the release of gas dissolved in defects, interconnection of subsurface defects, and the frictional heating effect. These findings provide key insights for controlling ceramic friction outgassing in vacuum systems.