高级检索

紫外辐照对聚酰亚胺薄膜放气率的影响

The Effect of Ultraviolet Irradiation on the Outgassing Rate of Polyimide Film

  • 摘要: 真空系统中材料的放气率是影响其真空度的关键因素。聚酰亚胺(PI)因其优异性能广泛应用于真空领域,但其表面和内部会吸附溶解大量气体,导致未经处理的PI放气率可达10−6 Pa·m3/(s·cm2)量级。本文以聚酰亚胺薄膜为研究对象,系统探究紫外辐照对其放气行为的调控机制。通过设计波长(185 nm、254 nm、365 nm)、功率(40 W、60 W、100 W)及辐照时间(0–30 min)的多组对照实验,结合放气率测量系统,分析了紫外光解吸对PI放气率的影响规律。结果表明:紫外辐照通过直接光解吸、电子跃迁诱导解吸及光化学解吸等机制协同作用,可以显著降低PI放气率。使用254 nm,60 W的紫外灯,经过30 min的紫外辐照,PI的放气率降低了约76%。

     

    Abstract: The outgassing rate of materials is a critical factor influencing the vacuum level. Polyimide (PI) is widely used in the vacuum field because of its excellent performance, but its surface and interior will absorb and dissolve a large amount of gas, resulting in the outgassing rate of untreated PI up to the order of 10−6 Pa·m3/(s·cm2). This study focuses on polyimide films and systematically investigates the regulatory mechanisms of ultraviolet (UV) irradiation on their outgassing behavior. By designing multiple control experiments with varying UV wavelengths (185 nm, 254 nm, 365 nm), powers (40 W, 60 W, 100 W), and irradiation times (0−30 min), combined with an outgassing rate measurement system, the effects of UV photodesorption on the outgassing rate of PI were analyzed. The results demonstrate that UV irradiation, through synergistic mechanisms including direct photodesorption, electronic transition-induced desorption, and photochemical desorption, significantly reduces the outgassing rate of PI. Specifically, using a 254 nm, 60 W UV lamp for 30 min of irradiation decreased the PI outgassing rate by approximately 76%.

     

/

返回文章
返回