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大型低温泵KDCP-22的设计仿真与性能实验

Design and Simulation of Large-scale Cryopump KDCP-22 with Experimental Performance Analysis

  • 摘要: 本文介绍了22寸口径单制冷机结构低温泵的设计及性能测试过程,简化传统结构降低了挡板与冷伞的加工难度,并通过导热、辐射模型对防辐射屏、挡板与冷伞等结构进行了仿真模拟,其中挡板上的实测数据(92.8 K)与仿真数据(93.9 K)差值最大,为1.1 K;一二级的辐射漏热仿真值分别为52.339 W和0.516 W。依托低温泵性能测试平台,对样机的降温特性、抽气能力进行了系统性测试,其中低温泵从290 K降至20 K用时177 min,稳定温度为一级65 K,二级4.5 K;氮气、氩气与氢气的抽速为13520、11154、16224 L·s−1;氩气的抽气容积值为13475 Std·L(273.15 K,1个标准大气压),各项指标均满足设计要求,达到国外竞品同等水平。

     

    Abstract: This paper introduces the design and performance test process of a 22-inch single cold head cryopump. The traditional structure is simplified to reduce the processing difficulty of the baffle and cryopanel. Moreover, simulation and modeling of structures such as the anti-radiation shield, baffle and cryopanel are carried out based on heat conduction and radiation models. Among them, the maximum difference between the measured data (92.8 K) and the simulated data (93.9 K) on the baffle is 1.1 K; the simulated values of radiation heat leakage for the primary and secondary stages are 52.339 W and 0.516 W respectively. Relying on the cryopump performance test platform, systematic tests are conducted on the cooling characteristics and pumping capacity of the prototype. Specifically, it takes 177 minutes for the cryopump to cool down from 290 K to 20 K, with the stable temperatures being 65 K for the primary stage and 4.5 K for the secondary stage; the pumping speeds for nitrogen, argon and hydrogen are 13520, 11154 and 16224 L·s−1 respectively; the pumping capacity of argon is 13475 Std·L (at 273.15 K and 1 standard atmosphere). All indicators meet the design requirements and reach the equivalent level of the foreign competitor.

     

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