Abstract: Claw-type dry vacuum pumps are widely used in the semiconductor manufacturing industry due to their oil-free and high-efficiency characteristics. To address the wear issues of traditional claw-type vacuum pumps in environments containing particulate media, this study proposes a rotor structure optimization method based on the principle of asymmetric incomplete meshing. Parametric equations for rotor profiles were established through theoretical derivation, with a focus on optimizing key geometric parameters such as the pitch circle radius ratio and the inclination angle of the claw tip. Numerical simulations were conducted to analyze the working characteristics of the novel rotors. The results indicate that the optimized rotor achieves a volumetric efficiency of 41.55%, reduces pressure fluctuations during the mixing phase, and significantly enhances particle transport performance. The asymmetric claw-type rotor design effectively improves pressure and velocity distributions, achieving a 42.35% reduction of the peak pressure in the residual clearance chamber, while enhancing the pump efficiency and reliability. This design not only reduces energy consumption and extends equipment lifetime but also significantly enhances the process stability of semiconductor manufacturing. The findings provide a solid theoretical foundation for developing high-performance claw-type dry vacuum pumps suitable for the semiconductor and related industries, offering substantial application value. These findings provide valuable insights for the development of high-performance claw-type dry vacuum pumps in semiconductors and related industries.