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射频电源电参数对四极质谱计性能影响理论分析与仿真验证

Theoretical Analysis and Simulation Verification of the Influence of Radio Frequency Power Electrical Parameters on the Performance of Quadrupole Mass Spectrometer

  • 摘要: 四极质谱计在各行业的需求量不断加大,我国也逐步开始高精度四极质谱计研究,因此对射频电源性能提出更高要求。基于四极电场以及电参数影响因素理论,使用离子光学仿真软件SIMION针对不同电参数对电场运动以及离子轨迹进行了建模与仿真分析。仿真分析结果表明,在给定的仿真参数下,增大偏置电压可以减小离子入射能量,从而对分辨率有一定改善,但由于大质量数离子受边缘场影响更大,因此大质量数离子通过率下降明显;增大电源频率可以提高四极质谱计分辨率,但会使得仪器灵敏度变差,同时高频会使得对应电压升高,增加电源的制造难度;提高直交比会减小离子通过率,提高分辨率,但在同一直交比下由于稳定区域的非线性,使得大质量数分辨率相对小质量数会明显变差,实际生产中可能需考虑不同的直交比来达到要求。以上结果为射频电源研制与使用提供了理论支撑。

     

    Abstract: The demand for quadrupole mass spectrometers in various industries is continuously increasing. China has gradually started research on high-precision quadrupole mass spectrometers, thus putting forward higher requirements for the performance of radio frequency (RF) power supplies. Based on the theory of quadrupole electric fields and the influencing factors of electrical parameters, the ion optical simulation software SIMION was used to model and simulate the electric field motion and ion trajectories for different electrical parameters. The simulation results show that under the given simulation parameters, increasing the bias voltage can reduce the ion incident energy, thereby improving the resolution to a certain extent. However, due to the greater influence of the fringe field on large-mass ions, the pass rate of large-mass ions decreases significantly. Increasing the power supply frequency can improve the resolution of the quadrupole mass spectrometer, but it will deteriorate the instrument sensitivity. At the same time, the high frequency will lead to an increase in the corresponding voltage, increasing the manufacturing difficulty of the power supply. Increasing the DC/RF ratio will reduce the ion pass rate and improve the resolution. However, due to the non-linearity of the stability region under the same DC/RF ratio, the resolution of large-mass numbers is significantly worse than that of small-mass numbers. In actual production, different DC/RF ratios may need to be considered to meet the requirements. The above results provide theoretical support for the development and application of RF power supplies.

     

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