Abstract:
This study investigates the characterization of metallic samples and non-conductive nanomaterials using the Zeiss Sigma500 thermal field emission scanning electron microscope. A systematic analysis was conducted to examine the effects of In-lens, ET-SE, and HDBSD detector signal synergistic imaging modes on material characterization. The results demonstrate that employing synergistic signal imaging strategies effectively integrates the unique advantages of different detectors in electron signal collection and imaging performance. Specifically, the In-lens detector excels in resolving surface details, the ET-SE detector is highly sensitive to spatial structures, and the HDBSD detector is adept at distinguishing atomic number contrasts. Experimental findings reveal that this synergistic imaging approach not only captures more comprehensive surface structural information but also suppresses interference factors such as charging effects, thereby significantly improving the accuracy and completeness of heterogeneous material morphology characterization. This study confirms that a multi-detector signal synergistic imaging strategy offers an efficient testing solution for multidimensional material characterization and demonstrates significant potential for microstructural analysis in complex material systems.