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大气压低频容性耦合Ar/O2放电特性研究

The Atmospheric Pressure Low-frequency Capacitive Coupling Ar/O2 Discharge Characteristics

  • 摘要: 本文采用一维流体模型,对大气压低频(100 kHz)Ar/O2等离子体的放电特性进行深入剖析,着重探讨了气压、频率对等离子体密度、电离率、电子温度以及轰击到上极板处离子能量等参数的影响。结果显示,低频放电中γ模式占主导,DA(Drift-Ambipolar )模式相对较弱,但呈现出明显的漂移电场和双极扩散场,电子主要集中在上极板处,轰击到上极板处离子能量较高。随着放电频率的增加,放电模式先由γ模式主导γ / DA混合模式转变为DA模式主导α / DA混合模式,然后转变为α模式主导α / DA混合模式,模式转换对电子密度、电子温度和轰击到上极板处离子能量均有显著影响。当气压增加时,也会发生模式转换现象,但低频区和高频区等离子体密度随气压呈完全不同的变化趋势。更为重要的是随着气压的增加,高频区DA模式明显增强,低频区DA模式减弱。

     

    Abstract: In this paper, the one-dimensional fluid model is used to study the discharge characteristics of Ar/O2 plasma at low frequency (100 kHz). The effects of pressure and frequency on plasma density, ionization rate, electron temperature and ion energy bombarded to the upper plate are discussed. The results show that the γ mode dominates in the low-frequency Ar/O2 discharges, while the drift-ambipolar (DA) mode is relatively weak, but exhibits significant drift electric field and ambipolar field. Electrons are mainly concentrated at the upper electrode, and ion energy bombarded to the upper plate is much higher. With the increase of discharge frequency, the mode initially undergoes a transition, whereby it is first shifted from the γ / DA hybrid mode, which is predominantly governed by the γ mode, to the α / DA hybrid mode, which is predominantly governed by the DA mode, and then transitions into the α / DA hybrid mode dominated by the α mode. The mode transition has a significant effect on electron density, electron temperature and ion energy bombarded to the upper plate. When the pressure increases, the mode conversion phenomenon will also occur. However, the plasma density in the low frequency region and the high frequency region shows a completely different trend with the pressure. More importantly, as the pressure increases, the DA mode in the high frequency region is obviously enhanced, and the DA mode in the low frequency region is weakened.

     

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