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连续流下挡板阀流导的数值模拟研究

Numerical Simulation Study of Baffle Valve Flow Conduction under Continuous Flow

  • 摘要: 挡板阀的流导求解一般采用近似等效计算方法或稳态数值模拟方法,其求解结果准确性和适用性有待提升。本文基于RANS和NS方程,构建了包含真空室、规则管道和挡板阀的动态流导测定模型,采用Fluent瞬态求解器模拟了连续流气体的低真空抽气过程。通过监测挡板阀进出口的压力和流率,求解挡板阀在不同压力下的流导值,并采用最小二乘法拟合得到挡板阀的流导计算公式。模拟方法的验证实验表明,模拟所得流导值与理论值吻合良好,验证了该方法的准确性和适用性。将挡板阀流导计算公式应用于抽气预测曲线的计算中,对比抽气预测曲线与抽气实验曲线发现,抽气结束时间的预测值与实际值的相对误差为4.76%,表明了本文得到的挡板阀流导计算公式具有实用性和可靠性。本研究可为低真空抽气过程中的异型管路元件流导计算提供方法上的参考。

     

    Abstract: The flow conductivity of baffle valves is generally solved using approximate equivalent methods or steady-state numerical simulation methods, and the accuracy and applicability of the solution results need to be improved. This paper presents a novel approach, based on the Reynolds-Averaged Navier-Stokes (RANS) and Navier-Stokes (NS) equations, to model the flow conductance of baffle valves. A dynamic model encompassing a vacuum chamber, regular pipe, and baffle valve was developed to simulate the low vacuum pumping process of continuous flow gas with Fluent's transient solver. By monitoring the pressure and flow rate of the inlet and outlet of the baffle valve, the flow conductance values of the baffle valve at different pressures are determined, and the flow conductance calculation formula of the baffle valve is obtained by fitting with the least squares method. The validation experiments of the simulation method show that the simulated flow conductivity values are in good agreement with the theoretical values, which verifies the accuracy and applicability of the method. The baffle valve flow conductance formula is applied in the calculation of the pumping prediction curve, and the comparison of the pumping prediction curve and the pumping experimental curve revealed that the relative error between the predicted and actual values of the pumping end time was 4.76%, it is shown that the baffle valve flow conductance formula obtained in this paper is practical and reliable. This study can provide methodological references for the calculation of flow conductivity of special-shaped pipeline components in low vacuum pumping processes.

     

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