Abstract: Electron bombardment induced outgassing plays a critical role in the design of specific vacuum systems, with numerous bombarding factors influencing its behavior. An investigation was undertaken to analyze the impacts of these electron bombarding factors using 316L stainless steel, a typical vacuum material. The findings demonstrate that initial outgassing is immediate and dramatic, while subsequent electron exposure results in an immediate but less dramatic outgassing response, highlighting the significant impact of the fresh surface on outgassing properties. Furthermore, as the electron dose increases, both the outgassing amount and electron yield gradually decrease to almost half of their original values. Conversely, increasing electron flux leads to a slight increase in electron yield. Additionally, increasing bombarding electron energy results in a gradual increase in outgassing amount or electron yield. Moreover, the bombarding area significantly influences electron induced outgassing; specifically, as the bombarding size increases, the electron yield rapidly increases to eight times its original value. The primary gas component released from 316L stainless steel during electron exposure is H₂ along with some N₂/CO and CO₂; however, there is almost no outgassing of H₂O or O₂. Moreover, the ion current of these outgassed components detected by the residual gas analyzer (RGA) is also affected by parameters related to electron beam bombardment.