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磁悬浮分子泵转子径向位移波动抑制机理的研究

The Mechanism of Suppressing Radial Displacement Fluctuations in Magnetic Levitation Molecular Pumps

  • 摘要: 针对高转速下磁悬浮分子泵径向位移波动量大极易失稳的问题,提出一种基于磁悬浮分子泵转子结构抑制其径向位移波动的方法。以一台1.5 kW,27720 r/min高速磁悬浮分子泵为例,建立三维计算模型,利用有限元法对转子刚体模态、弯曲模态、临界转速以及挠性支承进行耦合求解,确定转子径向位移波动频率与转速间的变化规律,在此基础上,对磁悬浮分子泵转子结构变化对其径向位移波动的影响进行分析研究,揭示影响磁悬浮分子泵转子径向位移波动的机理,确定磁悬浮分子泵转子径向位移波动频率与转子轴向长度之间的解析关系,通过与研制样机在全转速范围内径向位移波动试验对比分析,验证了仿真计算的准确性。此方法可抑制磁悬浮分子泵转子位移波动频率量在80 Hz以上,为高速磁悬浮分子泵设计提供参考。

     

    Abstract: To address the issue of significant radial displacement fluctuations and instability of magnetic levitation molecular pumps at high rotational speeds, a method based on the rotor structure of the magnetic levitation molecular pump to suppress its radial displacement fluctuations is proposed. Taking a 1.5 kW, 27720 r/min high-speed magnetic levitation molecular pump as an example, a three-dimensional computational model is established. The finite volume method is used to solve the rotor rigid mode, bending mode, critical speed, and flexible support, determining the analytical relationship between the rotor radial displacement fluctuation frequency and the rotational speed. On this basis, the influence of changes in the magnetic levitation molecular pump rotor structure on its radial displacement fluctuations is analyzed and studied, revealing the mechanism affecting the radial displacement fluctuations of the magnetic levitation molecular pump rotor. The relationship between the frequency of radial displacement fluctuations and the axial length of the rotor is determined. Through comparative analysis of the radial displacement fluctuation tests of the developed prototype over the full speed range, the accuracy of the simulation calculations is verified. This method can suppress the radial displacement fluctuation frequency of the magnetic levitation molecular pump rotor above 80 Hz, providing a reference for the design of high-speed magnetic levitation molecular pumps.

     

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