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束源炉结构及布局对分子束外延薄膜材料均匀性影响的仿真

Simulation of the Uniformity Influence of Effusion Cell Structure and Layout in Molecular Beam Epitaxy

  • 摘要: 亿像素红外探测器是下一代红外探测器发展的重要方向,8英寸高均匀碲镉汞薄膜成为实现该技术的最重要一环。分子束外延系统中束源炉结构及布局是影响分子束外延碲镉汞薄膜材料组分及厚度均匀性的关键因素之一。本文从满足大尺寸高均匀碲镉汞外延薄膜材料的要求出发,对束源炉的束流产生和出射分布做了理论分析,模拟计算了束源炉布局和坩埚内源材料状态对衬底上外延薄膜材料膜厚均匀性的影响。使用多物理场仿真软件COMSOL,以圆柱形坩埚的束源炉为模型,模拟了束源炉装料量对到达衬底表面束流的影响,以束源炉到衬底平面的间距和束源炉与衬底平面的夹角两个维度的变化进行了仿真,计算了到达衬底表面的束流均匀性。结果显示,随着源材料的使用,到达衬底表面的束流接近线性下降;在束源炉与衬底平面角度为46°时,衬底平面的束流均匀性最好;随束源炉到衬底平面中心间距的增加衬底平面的束流均匀性逐渐变好,当距离大于300 mm时,束流均匀性在±1.5%以内,保障了8英寸高均匀碲镉汞薄膜材料的制备。

     

    Abstract: Billion-pixel infrared detectors are an important direction for the development of next-generation infrared detectors, and the 8-inch high-uniform Hg1-xCdxTe thin film has become the most crucial component of this technology. The structure and layout of molecular beam epitaxy(MBE) effusion cells are key factors influencing the composition and thickness uniformity of Hg1-xCdxTe epitaxy films. This paper theoretically analyzes the beam flux generation and emission distribution of effusion cells based on requirements for large-area high-uniformity Hg1-xCdxTe epitaxial films. It simulates and calculates the impacts of effusion cell layout and the usage of source materials within the cells on the thickness uniformity of epitaxial thin films. This article takes a cylindrical channel effusion cell as an example and uses COMSOL Multiphysics to simulate the MBE growth process with different distances and different angles from the effusion cell of MBE, and the uniformity of the beam reaching the substrate is calculated. The results show that the beam flux decreases nearly linearly with source material consumption. The highest thickness uniformity is achieved when the angle is 46°; as the distance increases, the thickness uniformity becomes better, and after 300 mm, the thickness uniformity is within ±1.5%. This ensures the successful preparation of 8-inch highly uniform Hg1-xCdxTe thin film.

     

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