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一种微针尖环形阵列阴极电子枪

A Micro-tip Circular Array Cathode Electron Gun

  • 摘要: 本文设计了一种场发射碳纳米管冷阴极微焦点电子枪,阴极采用圆锥形状沿对称轴一分为二,切面为底面,并在圆柱形凹槽内均匀分布,组成环形阵列,该设计呈凹面形状,具备预聚焦效果,为后续聚焦系统提供了更为理想的入射条件。此外,设计中还包括菱形栅孔栅网和双曲聚焦电极。阴极采用微针尖设计,显著增强尖端的电场强度,从而提高发射电流密度并降低开启电压;菱形栅孔栅网则能够实现较高的电子通过率;双曲聚焦电极通过优化电场分布实现电子束的高效聚焦,最终使电子束的压缩比达到955。我们使用CST有限元电磁仿真软件对电子枪的场发射性能进行了分析,通过优化几何参数和调整电压分布,在120 kV阳极电压下,电子枪实现了92.4%的电子通过率、279.1 μA的阳极电流和12 μm的焦斑尺寸。

     

    Abstract: This paper presents the design of a field emission carbon nanotube cold cathode micro-focus electron gun. The cathode is shaped as a cone divided symmetrically into two, with the cut surface serving as the base, and is evenly distributed in a cylindrical groove to form a circular array. This design features a concave shape with a pre-focusing effect, providing more optimal incident conditions for the subsequent focusing system. In addition, the design includes a rhombic grid mesh and a hyperbolic focusing electrode. The cathode employs a micro-tip design, significantly enhancing the electric field intensity at the tip, which improves the emission current density and reduces the turn-on voltage; the rhombic grid mesh enables a high electron transmission efficiency, and the hyperbolic focusing electrode optimizes the electric field distribution to achieve efficient focusing of the electron beam, ultimately resulting in a beam compression ratio of 955. The field emission performance of the electron gun was analyzed using CST finite element electromagnetic simulation software. Through optimizing the geometric parameters and adjusting the voltage distribution, the electron gun achieved an electron transmission efficiency of 92.4%, an anode current of 279.1 μA, and a focal spot size of 12 μm at an anode voltage of 120 kV.

     

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