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感应耦合等离子体电磁特性的模拟

Simulation of Electromagnetic Properties in Inductively Coupled Plasma

  • 摘要: 本研究基于等离子体隐身技术背景,建立了感应耦合等离子体(ICP)的电磁模型,用于分析不同放电条件下等离子体的电磁传输特性,为等离子体隐身技术提供理论支持。等离子体参数基于流体动力学模拟结果设定,以提高模型精度。通过模拟研究了ICP的反射频谱和吸收频谱。结果表明,调节气体压力、工作气体比例及功率等条件可有效控制衰减频带和幅度,实现雷达反射信号的抑制。其中,O-ICP对6 GHz以下低频段吸收较强,而Ar-ICP在6~14 GHz范围内吸收效率更高。随着压力或功率增加,吸收峰值向高频移动,且吸收频段展宽。此外,对比不同相位两匝线圈激发的ICP特性,发现反相电流激发的等离子体具有更低截止频率和较弱吸收能力。

     

    Abstract: This study develops an electromagnetic model of inductively coupled plasma (ICP) to explore its electromagnetic transmission properties under varying discharge conditions, supporting plasma stealth technology. Plasma parameters are derived from hydrodynamic simulations to ensure model accuracy. Simulations of ICP's reflection and absorption spectra reveal that adjusting gas pressure, gas ratio, and power effectively controls attenuation bands and amplitudes, suppressing radar reflection signals. O-ICP absorbs strongly below 6 GHz, while Ar-ICP is more efficient at 6−14 GHz. Increasing pressure or power shifts absorption peaks to higher frequencies and broadens the absorption range. Additionally, ICP excited by anti-phase currents shows lower cutoff frequencies and weaker absorption than in-phase currents.

     

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