Abstract: Low-pressure vacuum surface carburization technology, scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nanoindentation technology and high-temperature roll method were used to study the effects of the surface carburization and high-temperature roll on the HfNbTaTiZr refractory high-entropy alloy in this paper. The result that the microstructure of the high-entropy alloy is body-centered cubic has been calculated and analyzed by the solid-solution formation parameter for various multi-component alloys Ω and average valence electron concentration (VEC). This result is verified by testing the melted and rolled in the 1000℃ temperature samples. The characteristic peak positions of the binding energy of these five metal elements shift towards the low-energy direction, which indicates that the average electron density around these elements is increased. The carburized layer is prepared on the surface of the high-entropy alloy under the temperature of 1500℃, treatment time of 12 h, the ratio of argon to the ethyne 20, and furnace pressure of 50 Pa. The phases of the surface-carburized layer are HfC, HfTaC₂ and TaC₂ with the thickness ranging from 2.5 to 6 μm. The precipitated phases in slat shape are observed being arranged regularly in the parallel, vertical and approximately 50° angle in a certain grain. This indicates the relationship of crystallographic orientation between the precipitated phases and the matrix. The precipitate phases are composed of Hf and Zr elements with barely Nb, Ta and Ti elements. The phase of the surface-carburized layer is HfC with the thickness ranging from 4 to 9.5 μm, when the treatment time is increased to 60 h. The XPS results show that these five metal elements have a chemistry effect with the sufficient C element. The arranged regularity of the precipitated phases in the slat and patch shape is decreased. The Vickers hardness of the surface-carburized alloy can reach 2054.94±60.01 HV5, which is 6.7 times of the melted sample. This means that the surface-carburized process can increase the hardness and abrasive resistance of the HfNbTaTiZr refractory high-entropy alloy. The rolling deformation of 55.81% of this alloy can be obtained at 1000℃.