Abstract: In order to investigate the effect of micro-pitch discharge initiation paths on conventional Paschen curves, gas discharge experiments were carried out on two different sets of electrodes with electrode distances in the range of 10 μm−100 μm and air pressures of 1 kPa−100 kPa, and simulated using COMSOL multi-physics field simulation software. The electric field strength and electron density of the plate-plate electrodes in the micro-gap are also numerically calculated for the approximate discharge paths. It was found that in the absence of an insulating layer at the edge of the electrodes, the ionization coefficient between the electrodes during the platform period decreases with the decrease in air pressure, making the number of collisional ionizations in the gap decrease, which leads to difficulties in meeting the self-sustained discharge requirements within the electrode distance. At this time, by changing the discharge path to make the electrode edge of a position meet the self-sustained discharge requirements, so that the breakdown voltage is maintained near the minimum value, and in the process of changing the path, the electron density distribution will be accompanied by the path change to the electrode edge. At the same time, it was found that when the electrode distance is fixed, the extent to which the discharge requirements are met by extending the path will extend further toward the electrode edges as the air pressure decreases.