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微间距放电在不同气压与间距下路径改变的研究

The Path Change of Micro-pitch Discharges at Different Air Pressure and Distance

  • 摘要: 为了研究微米间距放电起始路径对传统巴申(Paschen)曲线的影响,在电极间距为10 μm−100 μm、气压为1 kPa−100 kPa的范围内,对两组不同电极进行气体放电实验,并利用COMSOL多物理场仿真软件模拟了板−板电极在微间距中的电场强度和电子密度,同时对近似放电路径进行数值计算。研究发现在电极边缘没有绝缘层时,平台期内电极间的电离系数会随着气压的降低而减小,使得间隙内的碰撞电离次数减少,从而导致电极间距内难以满足自持放电要求。此时,通过改变放电路径使得电极边缘的某个位置满足自持放电要求,从而击穿电压维持在最低值附近,并且在路径改变的过程中,电子密度分布也会伴随着路径的改变向电极边缘发展。同时,发现在电极间距固定时,通过延长路径达到放电要求的程度,会随着气压的降低,向电极边缘处延伸的更长。

     

    Abstract: In order to investigate the effect of micro-pitch discharge initiation paths on conventional Paschen curves, gas discharge experiments were carried out on two different sets of electrodes with electrode distances in the range of 10 μm−100 μm and air pressures of 1 kPa−100 kPa, and simulated using COMSOL multi-physics field simulation software. The electric field strength and electron density of the plate-plate electrodes in the micro-gap are also numerically calculated for the approximate discharge paths. It was found that in the absence of an insulating layer at the edge of the electrodes, the ionization coefficient between the electrodes during the platform period decreases with the decrease in air pressure, making the number of collisional ionizations in the gap decrease, which leads to difficulties in meeting the self-sustained discharge requirements within the electrode distance. At this time, by changing the discharge path to make the electrode edge of a position meet the self-sustained discharge requirements, so that the breakdown voltage is maintained near the minimum value, and in the process of changing the path, the electron density distribution will be accompanied by the path change to the electrode edge. At the same time, it was found that when the electrode distance is fixed, the extent to which the discharge requirements are met by extending the path will extend further toward the electrode edges as the air pressure decreases.

     

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