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基于蒙特卡罗方法的低温冷阱流导、抽速仿真计算

Simulation and Calculation of Conductance and Pumping Speed for Cold Traps Based on Monte Carlo Method

  • 摘要: 随着半导体工艺的快速发展,对分子泵的抽气性能,特别是抽离水汽的能力提出了更高的需求,这使得搭配分子泵使用的组合型低温冷阱被广泛应用。氮气流导和水汽抽速是衡量低温冷阱性能的关键参数,与其内部冷凝板形状息息相关。水汽抽速因水分子的强吸附性使得通过实验测量变得极为困难。在本文中通过蒙特卡罗方法系统地研究了冷凝板大小、冷凝板折边对低温冷阱的氮气流导和水汽抽速性能影响。另外根据模拟结果研发设计了一款低温冷阱EWP200N,并且搭建了一套流导测试平台验证了EWP200N的氮气流导。结果表明,该款低温冷阱的氮气流导为2140 L/s,这与模拟结果2023 L/s非常吻合,证明此模拟计算方法准确性较高,可以定量评估低温冷阱的氮气流导和水汽抽速,具有较高的工程参考价值。

     

    Abstract: With the rapid advancement of semiconductor manufacturing processes, there are increasing demands for the pumping performance of molecular pumps, particularly their water vapor pumping capacity. This has led to the widespread application of combined cryogenic cold traps used in conjunction with molecular pumps. Nitrogen conductance and water vapor pumping speed, which are closely related to the geometry of internal condensing plates, serve as critical parameters for evaluating cold trap performance. Experimental measurement of water vapor pumping speed proves extremely challenging due to the strong adsorption characteristics of water molecules. This paper systematically investigates the effects of condensing plate dimensions and folded edges on nitrogen conductance and water vapor pumping speed using Monte Carlo simulations. Furthermore, based on the simulation results, a cryogenic cold trap named EWP200N was developed and its nitrogen conductance was validated through a specially constructed conductance testing platform. Experimental results demonstrate that the nitrogen conductance of EWP200N reaches 2140 L/s, showing close agreement with the simulated value of 2023 L/s. This confirms the high accuracy of the proposed simulation methodology in quantitatively assessing both nitrogen conductance and water vapor pumping speed, offering significant engineering reference value for cryogenic cold trap design.

     

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