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溅射离子泵空间磁场的分布优化研究

The Optimization of Spatial Magnetic Field Distribution in Sputter Ion Pumps

  • 摘要: 永磁体是溅射离子泵重要的组成部件,通过数值模拟对现有溅射离子泵结构中的空间磁场分布进行分析,从而得到溅射离子泵外磁场和内磁场分布特征。在此基础上,提出了降低磁场外溢的双层磁屏蔽结构和提高内部磁场均匀度的NN极同向阵列永磁体模型。双层磁屏蔽可以提供更高效屏蔽作用,气隙比控制在5%时,屏蔽效果可达到最大值的80%以上;内磁场将单一永磁体改为NN极同向阵列模型,可以有效提高磁场均匀度。提出的结构模型对溅射离子泵磁场优化设计提供一定的理论参考。

     

    Abstract: Permanent magnets are essential components of sputter ion pumps. Numerical simulation is used to analyze the spatial magnetic field distribution in the existing structure of sputter ion pumps, thereby obtaining the characteristics of the external and internal magnetic field distribution of the sputter ion pumps. Besides that, a double-layer magnetic shielding structure to reduce magnetic field leakage and an NN-pole co-directional array permanent magnet model to improve the uniformity of the internal magnetic field have been proposed. The double-layer magnetic shielding can provide more efficient shielding, and when the air gap ratio is controlled at 5%, the shielding effect can reach more than 80% of the maximum value; changing the single permanent magnet to an NN-pole co-directional array pattern can effectively improve the uniformity of the magnetic field. The proposed structural models offer a theoretical framework for optimizing the magnetic field design in sputter ion pumps.

     

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