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一种新型大抽速CP1250Xe复合低温泵

New High-Speed CP1250Xe Composite Cryopump

  • 摘要: 本研究成功设计了一种新型大抽速CP1250Xe复合低温泵,通过结构优化显著提高了Xe抽速,并能够有效抽除N2、H2等常规气体。实验结果表明,该低温泵的Xe抽速高达65000 L/s,对N2和H2的抽速也分别达到了60000 L/s,抽氢容量为150 L。这些成果证实了新型大抽速CP1250Xe复合低温泵在提升氙气抽速方面的显著优势,解决了传统低温泵Xe抽速无法达到理想抽速的问题,同时具备常规气体的抽气能力,为真空获得提供了强有力的技术支持。

     

    Abstract: In this study, a novel large pumping speed CP1250Xe composite cryopump has been successfully designed. Through structural optimization, the pumping speed of Xe has been significantly increased, and it is capable of effectively pumping out conventional gases such as N2 and H2. The experimental results show that the pumping speed of Xe for this cryopump is as high as 65000 L/s, and the pumping speeds for N2 and H2 reach 60000 L/s respectively. The hydrogen pumping capacity is 150 L. These achievements confirm the remarkable advantages of the novel large pumping speed CP1250Xe composite cryopump in enhancing the pumping speed of xenon gas, solving the problem that the Xe pumping speed of traditional cryopumps fails to reach the desired value, and meanwhile, it has the ability to pump conventional gases, providing strong technical support for vacuum acquisition.

     

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