Abstract: Electric propulsion technology using inert gases such as Xe/Kr as propellant has been increasingly applied in spacecraft, and these propulsion systems should undergo experimental verification in ground test facilities. In these facilities, dedicated xenon pumps/krypton pumps demonstrate significant advantages over conventional vacuum generating equipment, including higher pumping speed and superior ultimate vacuum levels. This paper investigates the pumping speed, thermal load, and cooling processes of xenon/krypton pumps through theoretical analysis and CFD numerical simulations, discussing the impacts of cold plate geometry, material selection, and the growth of xenon ice and krypton ice on vacuum pump performance. Additionally, a test system was established to measure the pumping speed of xenon/krypton pumps, revealing a calculation error below 5% between theoretical predictions and experimental measurements.