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基于四极质谱分析计的多种类示漏气体检漏仪设计与应用

Design and Application of Multi-species Gas Leak Detector Based on Quadrupole Mass Spectrometer Analyzer

  • 摘要: 针对氦质谱检漏仪难以实现原位同工质检漏以及氦本底被污染后检漏效率低等问题,设计了一台多种示漏气体检漏仪,根据不同需求选择合适的示漏气体,可提高检测结果的准确性及效率。本文利用四极质谱计具备分析多种气体成分的特性,参照氦质谱检漏仪的工作原理,设计了一套以四极质谱计为核心传感器能的检漏仪,在结构设计上,各零部件、控制器采用分体式结构设计,整机拆分组合灵活,可自行搭建4种检测系统;气体进样接口采用了三级分选结构,可以满足100 kPa~10−7 Pa压力下进样的需求,可实现负压与正压的检漏。在软件上研究了一种检漏信号的线性校准算法,同时将原软件的分压力信号转为了漏率信号,提高了检漏数据处理的可靠性和效率。多种类示漏气体检漏仪性能测试结果及应用表明,该检漏仪性能状态良好,负压检漏灵敏度可达10−13 Pa·m3/s量级,正压检漏灵敏度可达10−8 Pa·m3/s量级;以He、Kr、CF4、Ne、Ar等可以作为示漏气体时,检漏灵敏度排序为He>Kr>CF4>Ne≈Ar。该成果可为类似四极质谱检漏仪的研制提供技术支撑,可为示漏气体种类的选择提供依据。

     

    Abstract: Aiming at the problems that helium mass spectrometry leak detector cannot realize in-situ homogeneous mass leak detection and the low leak detection efficiency after helium background is contaminated, a leak detector with multiple leak detection gases is designed, and the selection of suitable leak detection gases according to the different needs can improve the reliability and efficiency of the detection results. In this paper, the quadrupole mass spectrometer has the characteristic of analysing many kinds of gas components, and with reference to the working principle of helium mass spectrometry leak detector, a quadrupole mass spectrometer as the core sensor leak detector is designed. In the structural design, the parts and controllers are designed in a split structure, and the whole machine is flexible to be split into combinations and can be used to set up four kinds of detection systems by itself. The gas inlet interface adopts a three-stage sorting structure, which can meet the demand of sample inlet under the pressure of 100 kPa~10−7 Pa and can realize the leakage detection of negative pressure and positive pressure. A linear calibration algorithm of the leakage detection signal is studied in the software, and at the same time, the partial pressure signal of the original software is converted into the leakage rate signal, which improves the reliability and efficiency of the leakage detection data processing. The performance test results and applications of the leak detector for multiple types of leaks indicating gases show that the performance of the leak detector is in good condition, and the negative pressure leak detection sensitivity is up to the order of 10−13 Pa·m3/s, and the positive pressure leak detection sensitivity is up to the order of 10−8 Pa·m3/s. He, Kr, CF4, Ne, Ar, etc. were used as leak indication gases, and the leak detection sensitivity can be in the order of He>Kr>CF4>Ne≈Ar. The results can provide technical support for the development of similar quadrupole mass spectrometry leak detectors and provide a basis for the selection of leak detection gases.

     

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