Abstract: The gas filter system is filled with noble gases (e.g., argon, neon and helium), which display strong absorption above their ionization energy. This helps to filter out the high harmonics of the incident beam in the synchrotron radiation beamline. In this paper, the angular coefficient method was employed to assist in the design of gas filters. It simulates and analyses the combustion beamline gas filter and compares the results with those obtained from the experiment. It then optimizes the design of the gas filter at the mass spectrometry beamline and analyses the spatial distribution of the pressure inside the filter chambers. The results demonstrate that the simulation results for the combustion beamline gas filter are in good agreement with the experimental results. In the further design of the mass spectrometry beamline filter cell, the increase in spot size results in a higher number density of molecular beam flow inside the chamber. It is challenging to reduce the chambers’ pressure by adjusting the multi-stage differential piping. Furthermore, the pressure distribution inside the differential tube exhibits a steep rise phenomenon.