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ECR等离子体产生的电子束源设计和仿真分析

Design and Numerical Simulation of Electron Beam based on ECR Plasma Source

  • 摘要: 电子回旋共振(ECR)放电系统作为电子枪束源,能有效解决传统热阴极电子枪寿命短,性能不稳定的缺陷。为探究ECR等离子体产生的电子束源时等离子体的参数变化,基于2.45 GHz,100 W的微波输入,开展ECR放电系统的仿真分析,以氩气体作为放电气体,考虑碰撞、激发、电离等过程。建立ECR等离子体放电模型,探究不同工作气压条件下ECR等离子体内的电子密度、电子温度等参数,并以此计算电子发射电流。结果表明,工作气压从0.005 Pa增加至0.04 Pa的过程中,电子发射电流从60.5mA增加至85.2mA,满足电子束加工所需的束源要求,为设计ECR等离子体阴极电子枪设计提供参考。

     

    Abstract: The electron cyclotron resonance (ECR) discharge system, generating an electron beam, can effectively address the shortcomings of traditional thermal cathode electron guns, such as short lifespan and unstable performance. To investigate the characteristics of an electron beam source, a simulation analysis of an ECR discharge system operating at 2.45 GHz with a 100 W microwave input was conducted. Argon gas was used as the discharge gas, with processes such as collisions, excitation, and ionization incorporated into the simulation. An ECR discharge model was established to explore the variation of plasma parameters within the ECR plasma, such as electron density and electron temperature, under different working pressures, and to calculate the electron emission current based on these parameters. The results indicate that as the working pressure increased from 0.005 Pa to 0.04 Pa, the electron emission current increased from 60.5 mA to 85.2 mA, meeting the beam source requirements for processing. This study provides a reference for the design of ECR plasma cathode electron guns.

     

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