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郭琦, 韩琰, 袁翠平, 孙伟, 孙立臣, 孟冬辉, 闫荣鑫. 可实现大质量数检测的四极杆质谱计的关键参数设计及仿真研究[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202407010
引用本文: 郭琦, 韩琰, 袁翠平, 孙伟, 孙立臣, 孟冬辉, 闫荣鑫. 可实现大质量数检测的四极杆质谱计的关键参数设计及仿真研究[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202407010
GUO Qi, HAN Yan, YUAN Cuiping, SUN Wei, SUN Lichen, MENG Donghui, YAN Rongxin. Design and Simulation of Key Parameters of Quadrupole Mass Spectrometer for Large Mass Detection[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202407010
Citation: GUO Qi, HAN Yan, YUAN Cuiping, SUN Wei, SUN Lichen, MENG Donghui, YAN Rongxin. Design and Simulation of Key Parameters of Quadrupole Mass Spectrometer for Large Mass Detection[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202407010

可实现大质量数检测的四极杆质谱计的关键参数设计及仿真研究

Design and Simulation of Key Parameters of Quadrupole Mass Spectrometer for Large Mass Detection

  • 摘要: 随着我国科技的进步、技术的发展,特殊工程密闭环境内的气体成分需要精确检测,被检测对象除了小质量数(200 amu以内)气体成分之外,还包含重要的有机大质量数成分;气体成分最有效的检测仪器之一就是四极质谱计,我国质谱计研发单位大多数都集中在小质量数产品的设计生产,可测大质量数(可达1000 amu)的四极质谱计设计报道很少;文章设计了四极质谱计杆长、场半径、入口孔径、装配精度等机械参数,以及射频电压、直流电压等电参数,结合机械参数和电参数对离子的运动轨迹、离子的入射能量、离子的通过率、质谱计的分辨率等指标参数进行了模拟仿真计算,设计了质量数检测上限可达1000 amu的可测大质量数四极质谱计,能满足特殊领域密闭空间的应用需求。

     

    Abstract: With the advancement of science and technology in our country and the development of technology, the gas composition in the closed environment of special projects needs to be accurately detected. In addition to the gas composition of small m/z (within 200 amu), the detected object also contains important organic large m/z components; one of the most effective gas detection instruments for components is the quadrupole mass spectrometer. Most of the research and development institutions of mass spectrometers in China focus on the design and production of low m/z products. There are seldom reports on the design of quadrupole mass spectrometers that can measure large m/z (up to 1000 amu). In this article, mechanical parameters such as rod length, field radius, entrance aperture, and assembly precision of the quadrupole mass spectrometer are designed, as well as electrical parameters such as RF voltage and DC voltage, ion pass rate, resolution of the mass spectrometer and other index parameters were simulated and calculated, and a measurable large mass quadrupole mass spectrometer with a mass detection line up to 1000 amu was designed, which can meet the application requirements of confined spaces in special fields.

     

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