溅射镀膜单体机真空系统设计及性能分析

Sputter Coating Unit Vacuum System Design and Pumping Performance Prediction

摘要: 为了使溅射镀膜单体机的极限真空度达到5 \times 10^ - 4 \,\, \mathrmP\texta 并提高其抽空效率，提出了新的溅射镀膜单体机真空系统设计方案。利用MOLFLOW+软件对所设计的真空系统进行了极限真空度验证，真空室内部气压均优于 2.7 \times 10^ - 4 \,\, \mathrmP\texta ；同时，建立了真空系统的抽气计算模型，求解得到抽空曲线，与实机试验结果进行比较，结果显示，计算模型获得的抽空曲线与试验测试值偏差小于5%，可用于高真空系统性能分析。

Abstract: In order to make the ultimate vacuum of the sputter coating unit reach 5 \times 10^ - 4 \,\, \mathrmP\texta and improve its evacuation efficiency, a new design of the vacuum system of the sputter coating unit is proposed. Based on the MOLFLOW+ software, the ultimate vacuum of the designed vacuum system is verified, which is better than 2.7 \times 10^ - 4 \,\, \mathrmP\texta . A pumping calculation model of the vacuum system of the sputter coating unit is established, and the pumping curves are obtained by solving the model and comparing the results with those of the real machine test, which show that the deviation of the pumping curves obtained by the model from the experimental test values is less than 5%, which can be used for the performance analysis of the high-vacuum system.