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彭华兴, 刘术林, 梁晶, 闫保军, 刘辉, 刘翔宇, 张斌婷, 王建铭, 焦朋, 张洋, 独雅婕. 光纤耦合间接电子探测器结构设计及其实验结果[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202405011
引用本文: 彭华兴, 刘术林, 梁晶, 闫保军, 刘辉, 刘翔宇, 张斌婷, 王建铭, 焦朋, 张洋, 独雅婕. 光纤耦合间接电子探测器结构设计及其实验结果[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202405011
PENG Huaxing, LIU Shulin, LIANG Jing, YAN Baojun, LIU Hui, LIU Xiangyu, ZHANG Binting, WANG Jianming, JIAO Peng, ZHANG Yang, DU Yajie. The Design and Experimental Results of Fiber Optic Plate Coupled Indirect Electron Detector[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202405011
Citation: PENG Huaxing, LIU Shulin, LIANG Jing, YAN Baojun, LIU Hui, LIU Xiangyu, ZHANG Binting, WANG Jianming, JIAO Peng, ZHANG Yang, DU Yajie. The Design and Experimental Results of Fiber Optic Plate Coupled Indirect Electron Detector[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202405011

光纤耦合间接电子探测器结构设计及其实验结果

The Design and Experimental Results of Fiber Optic Plate Coupled Indirect Electron Detector

  • 摘要: 依据透射电子显微镜中透射电子成像的特点,设计出纤维光学面板耦合CMOS相机的间接电子成像探测器,分别改变荧光粉层和铝膜的厚度,发现在相同条件下,薄荧光粉相较于厚荧光粉可以得到更亮的图像;在较小范围内,铝膜厚度的改变对图像亮度几乎无影响;考虑到微通道板对高能电子有一定的探测效率,尝试在荧光屏前放置微通道板,测试结果表明微通道板能够有效提高图像亮度,其在700 V工作电压下,荧光屏亮度较未安装微通道板的情况提高了30倍,并且微通道板能够屏蔽X射线,更换成本较低,可能是间接电子探测器的一个新选择。

     

    Abstract: According to the characteristics of transmission electron imaging in the transmission electron microscope, an indirect electron imaging detector coupling a fiber optics plate with a CMOS camera was designed. By varying the thickness of the phosphor layer and the aluminum film, respectively, it was found that under the same conditions, thinner phosphor layers could obtain brighter images than the thicker ones. Within a small range, changing the thickness of the aluminum film had little effect on image brightness. Considering the detection efficiency of the microchannel plate (MCP) for high-energy electrons, attempts were made to place the MCP in front of the phosphor screen. Test results showed that the MCP effectively increased image brightness, with a 30-fold increase in screen brightness at a working voltage of 700 V compared to the situation without the MCP. Considering the ability of the MCP to shield X-rays and its relatively low replacement cost, it may be a new choice for indirect electron detectors.

     

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