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季旭, 许高斌, 尹盛华, 王峰, 孙百川. 基于数字声音重建的静电MEMS扬声器设计[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202404001
引用本文: 季旭, 许高斌, 尹盛华, 王峰, 孙百川. 基于数字声音重建的静电MEMS扬声器设计[J]. 真空科学与技术学报. DOI: 10.13922/j.cnki.cjvst.202404001
JI Xu, XU Gaobin, YIN Shenghua, WANG Feng, SUN Baichuan. Design of Electrostatic MEMS Speaker Based on Digital Sound Reconstruction[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202404001
Citation: JI Xu, XU Gaobin, YIN Shenghua, WANG Feng, SUN Baichuan. Design of Electrostatic MEMS Speaker Based on Digital Sound Reconstruction[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. DOI: 10.13922/j.cnki.cjvst.202404001

基于数字声音重建的静电MEMS扬声器设计

Design of Electrostatic MEMS Speaker Based on Digital Sound Reconstruction

  • 摘要: 针对目前基于数字声音重建技术的扬声器再现声音动态范围窄、失真严重的问题,设计了一种响应速度快、声学输出可线性相加的静电MEMS扬声器。该扬声器采用了包括双背板、悬臂梁和缓冲锥的复合式振膜结构,显著降低了扬声器的振膜刚度和提高了振动自由度,从而优化了扬声器的工作效率并减少了响应时间。利用Comsol Multiphysics软件对扬声器进行几何结构参数优化和性能仿真,确定当扬声器的振膜厚度为1 μm,振膜半径为110 μm,电极/振膜比为40%,空腔高度为6 μm时综合性能最优,结果证明该扬声器的声学响应时间低于23 μs且声学输出满足线性相加,这表明该扬声器具有良好的声学响应,为实现数字声音重建提供良好技术支持。最后,基于MEMS加工工艺设计了静电MEMS扬声器的工艺流程。

     

    Abstract: Aiming at tackling the current challenges of limited dynamic range and significant distortion in digital audio reconstruction with speakers, we have developed an electrostatic MEMS (Micro-Electro-Mechanical Systems) speaker with rapid response and linearly summable acoustic output. The speaker incorporates a composite diaphragm structure featuring a dual backplate, cantilever beam, and buffering cone, which significantly reduces the diaphragm's stiffness and enhances its vibrational freedom. Consequently, this design optimizes the operational efficiency and reduces response time. Utilizing Comsol Multiphysics software, we conducted geometrical optimization and performance simulation of the speaker and the optimum combination of structural parameters is determined as follows: the film thickness of the loudspeaker is 1 μm, the film radius is 110 μm, the electrode/film ratio is 40%, and the cavity height is 6 μm. The results confirmed that the acoustic response time of the speaker is under 23 μs, and the acoustic output adheres to the principles of linear superposition, indicating a high-quality acoustic response. These findings suggest that the speaker provides robust technical support for the implementation of digital audio reconstruction. Finally, we have designed a fabrication process for the electrostatic MEMS speaker based on MEMS manufacturing techniques, ensuring the device's precision and performance in real-world applications.

     

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