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韩攀阳, 姜琪, 冯进军, 李兴辉, 蔡军. Spindt阴极研究进展和面临的问题[J]. 真空科学与技术学报, 2024, 44(9): 768-778. DOI: 10.13922/j.cnki.cjvst.202403009
引用本文: 韩攀阳, 姜琪, 冯进军, 李兴辉, 蔡军. Spindt阴极研究进展和面临的问题[J]. 真空科学与技术学报, 2024, 44(9): 768-778. DOI: 10.13922/j.cnki.cjvst.202403009
HAN Panyang, JIANG Qi, FENG Jinjun, LI Xinghui, CAI Jun. Research Progress and Facing Challenges of Spindt Cathode[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(9): 768-778. DOI: 10.13922/j.cnki.cjvst.202403009
Citation: HAN Panyang, JIANG Qi, FENG Jinjun, LI Xinghui, CAI Jun. Research Progress and Facing Challenges of Spindt Cathode[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2024, 44(9): 768-778. DOI: 10.13922/j.cnki.cjvst.202403009

Spindt阴极研究进展和面临的问题

Research Progress and Facing Challenges of Spindt Cathode

  • 摘要: 基于先进的微纳加工技术制备的Spindt阴极相比于热阴极具有可以瞬时启动、工作电压低、可在常温下工作等优势。尽管Spindt阴极性能优越,但很难实现真正的实用化,归根结底在于Spindt阴极的低可靠性。近几十年来,国内外研究者致力于从结构、材料以及工艺技术方面提高Spindt阴极的场发射特性以及耐用性,除了不断提高Spindt阴极的性能以满足高功率和高频率真空电子器件的需求,也在寻找和探索其它小电流、低能量、高可靠性的应用新领域,以更好地发挥Spindt阴极的优势。文章对Spindt阴极的最新研究进展进行了综述。

     

    Abstract: The Spindt cathode based on advanced micro/nano processing technology has many advantages over the present thermionic cathode, for example, instant start, low working voltage, and the ability to work at room temperature, etc. Despite the superior performance of the Spindt cathode, it is difficult to achieve practicality, ultimately due to the low reliability of the Spindt cathode. In recent decades, researchers have committed to improving the field emission performance and reliability of Spindt cathode in terms of structure, materials, and process technology. In addition to continuously improving the performance of Spindt cathode to meet the needs of high frequency and high power vacuum electronic devices, researchers are also seeking and exploring other new fields with low current, low energy, and high reliability to better leverage the advantages of Spindt cathodes. The article provides a review of the latest research progress on Spindt cathodes.

     

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