基于碳纳米管电子源的高稳定电离真空计的性能研究

Performance Investigation of a Highly Stable Ionization Gauge Based on Carbon Nanotube Electron Source

摘要: 文章将碳纳米管电子源应用于高稳定电离真空计，通过结构和电参数优化，研制了样机，并开展了样机计量特性的实验研究，研究结果表明，新型电离规在6.87×10⁻⁶ Pa ~ 6.45×10⁻⁵ Pa的压力范围内，灵敏度在0.200 Pa⁻¹ ~ 0.245 Pa⁻¹的范围内波动，与仿真灵敏度0.250 Pa⁻¹的偏差最大为20%，灵敏度波动小于5.96%，证明该结构设计合理，有望应用于超高真空校准及精确测量领域。

Abstract: In this paper, a carbon nanotube electron source is applied to a highly stable ionization gauge, and a preliminary performance experimental study of the prototype is carried out. The results show that the sensitivity of the novel ionization gauge fluctuates in the range of 0.200 Pa⁻¹ ~ 0.245 Pa⁻¹ from 6.87×10⁻⁶ Pa to 6.45×10⁻⁵ Pa, with a maximum deviation of 20% from the simulated sensitivity of 0.250 Pa⁻¹, and the sensitivity fluctuation is less than 5.96%, which proves that the structure is well-designed and is expected to be applied to high vacuum calibration and precise measurement.