高级检索

一种高性能非蒸散型吸气剂的性能分析

Performance Analysis of a High-Performance Non-Evaporable Getter

  • 摘要: 非蒸散型吸气剂(NEG)是高真空和超高真空系统维持真空度的重要材料,具有高稳定性和高气体吸附性能,文章采用粉末冶金的方法制备出Zr59.46V29.81Al10.73吸气剂,并基于小孔流导法搭建了一套吸气剂性能测试的高真空系统,分别测试了气体种类及工作温度对吸气剂性能的影响,实验结果表明:Zr59.46V29.81Al10.73吸气剂对H2、CO2、N2都有很好的吸气性能,其对H2的吸气性能远超N2和CO2,但它不吸收He等惰性气体,不同工作温度对吸气性能有很大差异,其最佳工作温度为200℃。利用X射线衍射图谱(XRD)和扫描电子显微镜(SEM)及能量色散图谱(EDS)对吸气剂进行晶相、形貌和成分分析,结果表明Zr59.46V29.81Al10.73吸气剂表面呈现多孔状结构,其主要由 \mathrm\alpha -\mathrmZ\mathrmr 基固溶体、C15 Laves相及少量ZrxAly化合物组成,多孔的结构及 \mathrm\alpha -\mathrmZ\mathrmr 基固溶体、C15 Laves相的高比例有利于吸气剂对活性气体的吸附,因此Zr59.46V29.81Al10.73吸气剂展现出较好的性能。

     

    Abstract: Non evaporable getters (NEGs) are important materials for maintaining vacuum in high and ultra-high vacuum systems, with high stability and gas adsorption. This article uses the powder metallurgy method to prepare Zr59.46V29.81Al10.73, and builds a high vacuum system for testing based on the small hole flow conductivity method. The effects of gas type and working temperature on the performance are tested. Through experiments, it is known that Zr59.46V29.81Al10.73 has good suction performance for H2, CO2, and N2, and has the best performance for H2 , but it does not absorb inert gases such as He. At the same time, it indicates that the working temperature has a significant impact and the optimal working temperature is 200℃. The crystal phase, morphology, and composition of the adsorbent were analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive spectroscopy (EDS). The results showed that the surface of the alloy exhibited a porous structure, mainly composed of \mathrm\alpha -\mathrmZ\mathrmr , C15 Laves phase, and some ZrxAly compound. The structures and phase components are conducive to the adsorption of gases.

     

/

返回文章
返回