Abstract: The design of the claw rotor profile is the key factor in determining the performance of a claw vacuum pump. The gear claw rotors adopt a new type of tortuous meshing structure, which significantly reduces the leakage between the rotors of the traditional curved claw rotors. However, there are still many non-smooth points in the profiles, which reduces the mechanical properties. In order to solve the problem, this paper proposed a new high-sealed elliptical arc claw rotor, and the rotor profile equation was derived. The influence of the geometric parameters of the profile on the relative clearance and volume utilization of the claw pump was analyzed and compared with the gear claw rotor. The working process of the new rotor was studied, and the change of the clearance in the mixing process of the two rotors was compared and analyzed. The stress and deformation of the new rotor and the existing gear claw rotor in the working process were compared. The results show that compared with the existing gear claw rotor, the relative carryover of the new rotor is reduced by more than 10%, and the over-compression chambers and expansion chambers in the mixing process are reduced. The maximum deformation of the new rotor in the suction process and the mixing process is reduced by 10.11% and 16.06%, respectively, which greatly improves the performance of the claw rotors.